3 credits
Spring 2022 Lecture Distance Learning Upper Division(ECE 52600) Key topics in micro-electro-mechanical systems (MEMS) and biological micro-integrated systems; properties of materials for MEMS; microelectronic process modules for design and fabrication. Students will prepare a project report on the design of a biomedical MEMS-based micro-integrated system.
Course BME 581 from Purdue University - West Lafayette.