ECE 526: Fundamentals Of MEMS And Micro-Integrated Systems

3 credits

Spring 2025 Lecture Distance Learning Upper Division
Data from
Spring 2025
last updated 3/29/2025
Spring 2025 Instructors: ,

(BME 58100) Key topics in micro-electro-mechanical systems (MEMS) and biological micro-integrated systems; properties of materials for MEMS; microelectronic process modules for design and fabrication. Students will prepare a project report on the design of a biomedical MEMS-based micro-integrated system. Offered in alternate years. Permission of department required.

Course ECE 526 from Purdue University - West Lafayette.

Restrictions

NOJuniors (75-89 credits), Freshmen (0-14 credits), Sophomores (30-44 credits),...show more

GPA by professor

4.0Other terms
Baba...(Spring 2021)

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T

Chi Hwan Lee

MJD
3:00 pm
Lec
R

Chi Hwan Lee

MJD
3:00 pm
Lec

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ECE 526: Fundamentals Of MEMS And Micro-Integrated Systems